Work

The role of transient damage annealing in shallow junction formation

Year: 1989

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/0168-583x(89)90206-1

Author: Richard B. Fair

Institutions: Duke University, MCNC Research and Development Institute

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2041581849

FWCI: 2.017

Cites: 21

Cited by: 16

Related to: 10