Work

Structure and morphology of aluminium-oxide films formed by thermal oxidation of aluminium

Year: 2002

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(02)00787-3

Authors: L.P.H Jeurgens, W.G Sloof, F.D Tichelaar, E.J Mittemeijer

Institutions: Max Planck Society, Max Planck Institute for Intelligent Systems, Delft University of Technology, University of Stuttgart

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2041818953

FWCI: 5.403

Cites: 47

Cited by: 296

Related to: 8