Statistical control of VLSI fabrication processes. A framework
Year: 1988
Type: article
DOI: 10.1109/66.4375
Authors: P.K. Mozumder, C.R. Shyamsundar, A.J. Strojwas
Institution: Carnegie Mellon University
Language: English
Subfield: Statistics, Probability and Uncertainty
Field: Decision Sciences
Domain: Social Sciences
Open Access status: closed
OpenAlex ID: W2041998145