Work

Microfabrication of fine-pitch high aspect ratio Faraday cup arrays in silicon

Year: 2007

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2007.03.022

Authors: Christopher A. Bower, Kristin H. Gilchrist, Matthew R. Lueck, Brian R. Stoner

Institution: RTI International

Language: English

Topic: Particle Detector Development and Performance

Subfield: Nuclear and High Energy Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2042635004

FWCI: 0.681

Cites: 18

Cited by: 24

Related to: 10