Work

Integrated CAD tools for top-down design of MEMS/MOEMS systems

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.341200

Authors: Bart F. Romanowicz, Stephen F. Bart, John R. Gilbert

Institution: Microcosm (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

OpenAlex ID: W2042758700

FWCI: 0.968

Cites:

Cited by: 3

Related to: 10