Work

Effects of SiF 4 and NH 3 Concentrations on the Low‐Pressure CVD of Polycrystalline α‐Si 3 N 4

Year: 1993

Type: article

Source: Journal of the American Ceramic Society

DOI: 10.1111/j.1151-2916.1993.tb03822.x

Authors: Woo Y. Lee, James R. Strife

Institutions: Oak Ridge National Laboratory, American Ceramic Society, United Technologies (United States)

Language: English

Topic: Advanced ceramic materials synthesis

Subfield: Ceramics and Composites

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2042805893

FWCI: 0.571

Cites: 3

Cited by: 4

Related to: 10