Work

Generation of optical disk servo patterns by lithographic imaging of photodeformable polymers

Year: 1990

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.22001

Authors: Phillip J. Brock, C. Grant Willson, Jerome D. Swalen, Mark C. Jurich, Robert D. Miller, Nicholas J. Clecak, Anthony Logan, Jean M. J. Frechet

Institutions: IBM (United States), IBM Research - Almaden, Cornell University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Centre National de la Recherche Scientifique

OpenAlex ID: W2043428940

FWCI: 1.181

Cites:

Cited by: 1

Related to: 10