Work

The preparation of very flat surfaces of silicon by electropolishing

Year: 1963

Type: article

Source: Solid-State Electronics

DOI: 10.1016/0038-1101(63)90054-6

Authors: D. Baker, J.R. Tillman

Institution: Parliamentary Office of Science and Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2043759536

FWCI: 2.652

Cites: 5

Cited by: 12

Related to: 10