Work

Statistical equipment modeling for VLSI manufacturing: an application for LPCVD

Year: 1990

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/66.61971

Authors: K.-K. Lin, C.J. Spanos

Institution: University of California, Berkeley

Language: English

Topic: Optimal Experimental Design Methods

Subfield: Management Science and Operations Research

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

OpenAlex ID: W2044093053

FWCI: 8.861

Cites: 29

Cited by: 62

Related to: 10