Work

Optimization of low-voltage electron optics

Year: 1993

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.146530

Authors: Laurence S. Hordon, Zhirong Huang, Raymond Browning, Nadim I. Maluf, Roger Fabian W. Pease

Institution: Stanford University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2044224668

FWCI:

Cites:

Cited by: 1

Related to: 10