Work

MEMS CAD beyond multi-million transistors (panel)

Year: 1999

Type: conference-paper

Source: ACM/IEEE Design Automation Conference (DAC)

DOI: 10.1145/309847.309993

Authors: Albert P. Pisano, Nicholas Swart, Mike Horton, John Rychcik, John R. Gilbert, Gerry K. Fedder, Kris Pister

Institutions: Defense Advanced Research Projects Agency, Analog Devices (United States), Visteon (United States), Carnegie Mellon University, University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2044315192

FWCI:

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