Work

Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation

Year: 2010

Type: article

Source: IEEE Transactions on Automation Science and Engineering

DOI: 10.1109/tase.2010.2043733

Author: James R. Morrison

Institution: Korea Advanced Institute of Science and Technology

Language: English

Topic: Advanced Queuing Theory Analysis

Subfield: Management Information Systems

Field: Business, Management and Accounting

Domain: Social Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W2044634403

FWCI: 5.707

Cites: 23

Cited by: 22

Related to: 10