Work

Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators

Year: 2013

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2013.2270434

Authors: Roozbeh Tabrizian, Giorgio Casinovi, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2044761720

FWCI: 3.794

Cites: 23

Cited by: 82

Related to: 10