Work

The patterning of sub-500 nm inorganic oxide and semiconducting polymeric structures

Year: 2008

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.794890

Authors: Meredith J. Hampton, Stuart S. Williams, Zhilian Zhou, Janine Nunes, Doo-Hyun Ko, Joseph L. Templeton, Joseph M. DeSimone, Edward T. Samulski

Institutions: University of North Carolina at Chapel Hill, Liquidia Technologies (United States), North Carolina State University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Office of Naval Research

OpenAlex ID: W2044889822

FWCI:

Cites: 28

Cited by: 2

Related to: 10