Work

Gettering of Metallic Impurities from Planar Silicon Diodes

Year: 1963
Type: article
Abstract: Experimental studies are presented in which reverse leakage currents in diffused silicon planar diodes are reduced by orders of magnitude via an intermediate temperature (800°–1000°C) gettering of metallic impurities which presumably cause excess leakage. Inorganic oxides having melting points below the gettering process temperature have been employed as the getters. Life test data on gettered diodes are also presented. The effectiveness of such gettering processes is further demonstrated by experiments in which radioactive copper is utilized as the diffused contaminant.
Authors: S. W. Ing, R. E. Morrison, L. L. Alt, R. W. Aldrich
Language: English
Open Access status: bronze
OpenAlex ID: W2044993337
FWCI: 3.873
Cites:
Cited by: 36
Related to: 10