Work

Microfabrication Techniques for Integrated Sensors and Microsystems

Year: 1991

Type: review

Source: Science

DOI: 10.1126/science.1962192

Authors: K. D. Wise, K. Najafi

Institution: University of Michigan

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2045134972

FWCI: 8.156

Cites: 15

Cited by: 312

Related to: 10