Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Quantum Limit
Year: 1999
Type: article
Source: Physical Review Letters
Authors: J. P. Dowling, Agedi N. Boto, Daniel M. Abrams, C. P. Williams
Language: English
Subfield: Artificial Intelligence
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2045276691
