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Enhancing the platinum atomic layer deposition infiltration depth inside anodic alumina nanoporous membrane

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Year: 2014
Type: article
Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
DOI: 10.1116/1.4904398
Authors: Amit Vaish, Susan Krueger, Michael Dimitriou, Charles Majkrzak, David J. Vanderah, Lei Chen, Klaus Gawrisch
Institutions: National Institute of Standards and Technology, NIST Center for Neutron Research, Institute for Bioscience and Biotechnology Research, Center for Nanoscale Science and Technology, National Institutes of Health, National Institute on Alcohol Abuse and Alcoholism
Language: English

Topic: Anodic Oxide Films and Nanostructures
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences

Open Access status: closed

Funders: National Institute of Standards and Technology, National Institute on Alcohol Abuse and Alcoholism, Center for Nanoscale Science and Technology
OpenAlex ID: W2045414188
FWCI: 0.605
Cites: 26
Cited by: 12
Related to: 10
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