Directed block copolymer self-assembly for nanoelectronics fabrication
Year: 2011
Type: article
DOI: 10.1557/jmr.2010.74
Author: Daniel J.C. Herr
Institution: Semiconductor Research Corporation
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2045988874