Work

Comparison of diamond-like carbon films deposited from 40 kHz and 13.56 MHz r.f. plasmas

Year: 1996

Type: article

Source: Diamond and Related Materials

DOI: 10.1016/0925-9635(95)00462-9

Authors: K. Donnelly, D.P. Dowling, T.P. O'Brien, A. O'Leary, T.C.Z Kelly

Institution: Forbairt

Language: English

Topic: Diamond and Carbon-based Materials Research

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2046262825

FWCI: 1.013

Cites: 10

Cited by: 13

Related to: 10