Work

Oxidation and removal mechanisms during chemical–mechanical planarization

Year: 2007

Type: article

Source: Wear

DOI: 10.1016/j.wear.2006.11.023

Authors: D. Ng, M. Kulkarni, J. Johnson, A. Zinovev, D. Yang, H. Liang

Institutions: Texas A&M University, Argonne National Laboratory, Hysitron (United States)

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Texas AgriLife Research, Texas A and M University, Office of Science

OpenAlex ID: W2046292804

FWCI: 1.673

Cites: 39

Cited by: 23

Related to: 10