Work

Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide

Year: 2004

Type: article

Source: Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences

DOI: 10.1080/10408430490888968

Authors: Charles A. Jones, Amy Zweber, James P. DeYoung., James B. McClain, Ruben Carbonell, Joseph M. DeSimone

Institutions: University of North Carolina at Chapel Hill, North Carolina State University, MiCell Technologies (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

OpenAlex ID: W2046592021

FWCI: 3.907

Cites: 75

Cited by: 60

Related to: 10