Work

Dynamic characterization of a linear electrostatic micromotor supported on microball bearings

Year: 2006

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2006.08.019

Authors: Nima Ghalichechian, Alireza Modafe, Jeffrey H Lang, Reza Ghodssi

Institutions: University of Maryland, College Park, Massachusetts Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2046817273

FWCI: 4.045

Cites: 41

Cited by: 40

Related to: 10