Work

Submicroscopic pattern replication with visible light

Year: 1981

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.571227

Authors: U. Ch. Fischer, H. P. Zingsheim

Institutions: Max Planck Society, Max Planck Institute for Biophysical Chemistry

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2046895154

FWCI: 0.313

Cites:

Cited by: 425

Related to: 9