Work

High-Performance Lateral-Actuating Magnetic MEMS Switch

Year: 2011

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2011.2159096

Authors: Michael Glickman, Peter Tseng, Jere Harrison, Trevor Niblock, Ira B. Goldberg, Jack W. Judy

Institutions: Samsung Semiconductor (United States), University of California, Los Angeles, Magzor (United States), California Lutheran University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, University of California, Los Angeles

OpenAlex ID: W2047612270

FWCI: 2.912

Cites: 35

Cited by: 29

Related to: 10