Work

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Year: 2013

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2013.11.030

Authors: Vanthanh Khuat, Yuncan Ma, Jinhai Si, Tao Chen, Feng Chen, Xun Hou

Institutions: Le Quy Don Technical University, Xi'an Jiaotong University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G3130211089, G6530672631, G8129668494

OpenAlex ID: W2047617695

FWCI: 2.641

Cites: 21

Cited by: 90

Related to: 10