Work

Materials processing by gas cluster ion beams

Year: 2001

Type: article

Source: Materials Science and Engineering R Reports

DOI: 10.1016/s0927-796x(01)00034-1

Author: I Yamada

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2047813746

FWCI: 10.17

Cites: 60

Cited by: 477

Related to: 10