Work

Nanostructuring in Ge by self-ion implantation

Year: 2010

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.3372757

Authors: L. Romano, G. Impellizzeri, M. V. Tomasello, F. Giannazzo, C. Spinella, M. G. Grimaldi

Institutions: University of Catania, Institute for Microelectronics and Microsystems

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Centre National de la Recherche Scientifique

OpenAlex ID: W2047900592

FWCI: 7.218

Cites: 19

Cited by: 92

Related to: 10