Work

PECVD grown SiO 2 film process optimization

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.874161

Authors: Song Ping, Lian Jie, Shang Gao, Ping Li, Xiao Wang, Shiliang Wu, Zheng Ma

Institution: Shandong University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2047954401

FWCI: 0.435

Cites:

Cited by: 2

Related to: 10