Work

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

Year: 2005

Type: article

Source: Applied Physics A

DOI: 10.1007/s00339-005-3225-1

Authors: K. Sugioka, Y. Cheng, K. Midorikawa

Institution: RIKEN

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2048640151

FWCI: 32.56

Cites: 21

Cited by: 195

Related to: 10