Work

Nanoscale Imaging of Buried Structures with Elemental Specificity Using Resonant X-Ray Diffraction Microscopy

Year: 2008

Type: article

Abstract: We report the first demonstration of resonant x-ray diffraction microscopy for element specific imaging of buried structures with a pixel resolution of approximately 15 nm by exploiting the abrupt change in the scattering cross section near electronic resonances. We performed nondestructive and quantitative imaging of buried Bi structures inside a Si crystal by directly phasing coherent x-ray diffraction patterns acquired below and above the Bi M5 edge. We anticipate that resonant x-ray diffraction microscopy will be applied to element and chemical state specific imaging of a broad range of systems including magnetic materials, semiconductors, organic materials, biominerals, and biological specimens.

Source: Physical Review Letters

DOI: 10.1103/physrevlett.100.025504

Authors: Changyong Song, Raymond Bergstrom, Damien Ramunno-Johnson, Huaidong Jiang, David Paterson, Martin D. de Jonge, Ian McNulty, Jooyoung Lee, Kang L. Wang, Jianwei Miao

Institutions: University of California, Los Angeles, Australian Synchrotron, Argonne National Laboratory, Advanced Photon Source

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2048761825

FWCI: 7.745

Cites: 33

Cited by: 89

Related to: 10