Work

Integrating CAD tools for MEMS design

Year: 1998

Type: article

Source: Computer

DOI: 10.1109/2.666845

Author: J.R. Gilbert

Institution: Microcosm (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2048979823

FWCI: 2.928

Cites:

Cited by: 20

Related to: 10