Work

Kinetics and Mechanism of Atomic Force Microscope Local Oxidation on Hydrogen‐Passivated Silicon in Inert Organic Solvents

Year: 2006

Type: article

Source: Advanced Materials

DOI: 10.1002/adma.200501231

Authors: C. R. Kinser, M. J. Schmitz, M. C. Hersam

Institution: Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2049764709

FWCI: 2.558

Cites: 34

Cited by: 35

Related to: 10