Electrostatic-pneumatic MEMS deformable mirror for focus control
Year: 2012
Type: conference-paper
Authors: Mohammad J. Moghimi, Chris Wilson, David L. Dickensheets
Institutions: Montana State University, Bridger Photonics (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2049788843