Surface micro-machined SU-8 2002 membrane mirrors for focus control
Year: 2010
Type: conference-paper
DOI: 10.1117/12.844292
Institutions: Montana State University, University of Freiburg
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Funder: National Science Foundation
OpenAlex ID: W2050209388
