In situ phase-modulated ellipsometry study of the surface damaging process of silicon under atomic hydrogen
Year: 2000
Type: article
Source: Solid State Communications
Authors: G Morell, I.M Vargas, J.Y Manso, J.R Guzmán, B.R Weiner
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2050329199
