Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization
Year: 2012
Type: article
Abstract: Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolution are presented by using photosensitive sol-gel material. The high photosensitivity of this material allows for TPP using a large variety in laser pulse durations covering a range between sub-10 fs and ≈140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolution by different approaches, namely, by adding a cross-linker to the material and polymerization with sub-10 fs short pulses. Additionally, a simulation and model based characterization method for periodic sub-100 nm structures was implemented and applied in an experimental white light interference Fourier-Scatterometry setup.
Source: Journal of Laser Applications
DOI: 10.2351/1.4712151
Authors: V. Ferreras Paz, M. Emons, K. Obata, A. Ovsianikov, S. Peterhänsel, K. Frenner, C. Reinhardt, B. Chichkov, U. Morgner, W. Osten
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W2050460778