Ion beam modification of structural and electrical properties of TiN thin films
Work
Year: 2008
Type: article
Institutions Vinča Institute of Nuclear Sciences, Institute of Economic Sciences, University of Göttingen
Cites: 11
Cited by: 14
Related to: 10
FWCI: 5.066
Citation percentile (by year/subfield): 82.8
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Affordable and clean energy
Open Access status: closed