Work

Compact ArF excimer lasers specific to microlithography and surgery

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.271552

Authors: Hitoshi Sekita, Jun-ichi Yano, Akifumi Tada, Masashi Tamegai, Kenichi Yoshida, Tadashi Kasamatsu, Shinji Ito, Takashi Saito, Yukio Ogura

Institution: NEC (Japan)

Language: English

Topic: Laser Design and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2051586687

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