Work

Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.354283

Authors: Andreas Koll, Adrian Kummer, Oliver Brand, Henry Baltes

Institution: ETH Zurich

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2051631487

FWCI: 4.837

Cites:

Cited by: 13

Related to: 10