Work

Improved state estimation for high-mix semiconductor manufacturing

Year: 2013

Type: conference-paper

Source: Proceedings of the ... American Control Conference/Proceedings of the American Control Conference

DOI: 10.1109/acc.2013.6580883

Authors: Jin Wang, Q. Peter He, Thomas F. Edgar

Institutions: Auburn University, Tuskegee University, The University of Texas at Austin

Language: English

Topic: Control Systems and Identification

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Division of Chemical, Bioengineering, Environmental, and Transport Systems

OpenAlex ID: W2051735084

FWCI:

Cites: 9

Cited by: 3

Related to: 10