Work

Raman Thermometry Measurements and Thermal Simulations for MEMS Bridges at Pressures From 0.05 Torr to 625 Torr

Year: 2010

Type: article

Source: ASME Journal of Heat and Mass Transfer

DOI: 10.1115/1.4000965

Authors: Leslie M. Phinney, Justin R. Serrano, Edward S. Piekos, John R. Torczynski, Michael A. Gallis, Allen D. Gorby

Institution: Sandia National Laboratories

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Nuclear Security Administration, Sandia National Laboratories

OpenAlex ID: W2051751976

FWCI: 2.206

Cites: 16

Cited by: 16

Related to: 10