A novel pulsed magnetron sputter technique utilizing very high target power densities
Year: 1999
Type: article
Source: Surface and Coatings Technology
Authors: Vladimir Kouznetsov, Karol Macák, Jochen M. Schneider, Ulf Helmersson, Ivan Petrov
Institutions: Linköping University, University of Illinois Urbana-Champaign
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2051944828