Work

Electrodes on a budget: Micropatterned electrode fabrication by wet chemical deposition

Year: 2009

Type: article

Abstract: Precise patterning of metals is required for diverse microfluidic and microelectromechanical system (MEMS) applications ranging from the separation of proteins to the manipulation of single cells and drops of water-in-oil emulsions. Here we present a very simple, inexpensive method for fabricating micropatterned electrodes. We deposit a thin metal layer of controlled thickness using wet chemistry, thus eliminating the need for expensive equipment typically required for metal deposition. We demonstrate that the resulting deposited metal can be used to fabricate functional electrodes: The wet-deposited metal film can sustain patterning by photolithography down to micron-sized features required for MEMS and microfluidic applications, and its properties are suitable for operative electrodes used in a wide range of microfluidic applications for biological studies.

Source: Biomicrofluidics

DOI: 10.1063/1.3224669

Authors: Wataru Ebina, Amy C. Rowat, David A. Weitz

Institution: Harvard University

Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: National Science Foundation, Harvard University, Materials Research Science and Engineering Center, Harvard University, Division of Materials Research

Awards: Materials Research Science and Engineering Center, G7679134096, Non-Equilibrium and Non-Linear Structure and Dynamics of Soft Materials