Work

A plasma immersion implantation system for materials modification

Year: 2001

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/s0257-8972(00)01043-4

Authors: Michael I Current, Wei Liu, Ian S Roth, Albert J Lamm, William G En, Igor J Malik, Lucia Feng, Michael A Bryan, Shu Qin, Francois J Henley, Chung Chan, Nathan W Cheung

Institutions: Northeastern University, University of California, Berkeley

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2052741832

FWCI: 2.318

Cites: 9

Cited by: 12

Related to: 10