Work

SiOx‐Based Multilayer Barrier Coatings Produced by a Single PECVD Process

Year: 2009

Type: article

Source: Plasma Processes and Polymers

DOI: 10.1002/ppap.200931703

Authors: Alessandro Patelli, Simone Vezzù, Lorenzo Zottarel, Enrico Menin, Cinzia Sada, Alessandro Martucci, Stefano Costacurta

Institution: University of Padua

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2052772390

FWCI: 1.116

Cites: 14

Cited by: 33

Related to: 10