Correlation of molecular hydrogen dissociation and the film quality of diamondlike carbon in plasma enhanced chemical vapor deposition
Year: 1995
Type: article
Source: Applied Physics Letters
DOI: 10.1063/1.113706
Authors: R. C. Cheshire, W. G. Graham, T. Morrow, V. Kornas, H. F. Döbele, K. Donnelly, D. P. Dowling, T. P. O’Brien
Institutions: Queen's University Belfast, University of Duisburg-Essen, Forbairt
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2053456657