Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing
Year: 2014
Type: article
Authors: Jenna L. Fu, Roozbeh Tabrizian, Farrokh Ayazi
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Georgia Institute of Technology
OpenAlex ID: W2053457424