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Coupled mechanical‐electrostatic FE‐BE analysis with FMM acceleration
Work
Year: 2004
Type: article
Abstract: This paper deals with the coupled mechanical‐electrostatic analysis of a shunt capacitive MEMS switch. The mechanical and electrostatic parts of the problem are modelled by the FE and BE methods, resp... more
Cites: 13
Cited by: 7
Related to: 10
FWCI: 0.865
Citation percentile (by year/subfield): 70.31
Sustainable Development Goal Affordable and clean energy
Open Access status: green