Work

Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements

Year: 2010

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2010.5442467

Authors: Zhenting Dai, Elise A. Corbin, William P. King

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2053589084

FWCI:

Cites: 8

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Related to: 10